我们在光学级石英的生长和批量生产方面有丰富的经验。我们拥有先进的晶圆生长,晶圆研磨,抛光和检验设备。
| Material | Quartz Crystal | |
| Cutting Angle | X/Y/Z-cut etc | |
| Diameter/size | 1”(25.4mm)-4”(100mm) | |
| Tol(±) | <0.20 mm | |
| Thickness | 0.05mm or more | |
| LTV (5mmx5mm) | <1?m | |
| TTV | <3?m | |
| Bow | -30<bow<30 | |
| Warp | <40?m | |
| Surface Type | Single Side Polished /Double Sides Polished | |
| Polished side Ra | <0.5nm | |
| Back Side Criteria | General is 0.2-0.5?m or as customized | |
| Scratch/Dig | Bette than 40/20 | |
| Edge Criteria | R=0.2mm or Bullnose | |
| Material Property | ECD | Better than grade 4 |
| Inclusion | Better than grade I | |
| Q-Value | Better than grade C | |
| Wafer Surface Criteria | Particles ¢>0.3 ?m | <= 30 |
| Scratch , Chipping | None | |
| Defect | No edge cracks, scratches, saw marks, stains | |
| Packaging | Qty/Wafer box | 25pcs per box |